Manufacturer
Zygo
Model
New View 7100
Category
Materials characterization
Application
Non contact films thickness, thin- and thick-film measurements, roughness studies, surface quality and defect review, etc.
Description
- Measurement technique: 3D optical interferometer.
- Field of view: from 0.5 to 2 mm.
- Objectives: 5x, 10x and 50x.
- Optical resolution: ≤ 4µm.
- x/y scan rate: ≤ 26µm/sek.
- Sample stage: motorized 150 mm x/y travel; manual ±6° tip/tilt.
- Sample maximum size: 89 x 203 x 203 mm.
- Vertical resolution: 0.1nm.
- Vertical scan range: 150µm.
- Focus: motorized manual and auto focus.
- On-screen live display: 23″ TFT monitor with live display.
- Scanning and processing software: ZYGO MetroPro.
