Laser writer Heidelberg µPG is a direct write mask-less lithography system that utilises UV laser beam to selectively expose samples in regions of interest.
The µPG101 system is equipped with a 375 nm UV light source, which has a maximum intensity of 70 mW and a write speed of 5 mm2/min.
The alignment tolerance specified on the tool is 200 nm (3σ value) with 120 nm edge roughness.
The maximum writeable area is 90×90 mm as defined by the write head used.
The write head also defines the feature size, which is defined as sub-1µm in the current set up.