Transparent films/photoresist thickness, thin- and thick-film measurements, roughness studies, surface quality and defect review, etc.
Measurement technique: stylus profilometry
Measurement capability: two-dimensional surface profile measurements
Sample viewing: 640 x 480-pixel (1/3in.-format) camera, USB:
Stylus sensor: low-inertia sensor (LIS 3)
Stylus force: 0.03 to 15mg (N-lite sensor)
Stylus radius: 12.5μm and 2.5μm