Thin film production
The SAF 25/50 multifunctional R&D cluster tool is intended for research and development works as well as for feasibility studies and more general academic work in the field of thin film technologies.
The tool is a multifunctional, expandable, modular and flexible system. The tool comprises an input/output chamber with ion gun, central substrate transfer chamber with radial telescopic transport arm and up to 7 deposition chambers. Substrate is positioned horizontally on a holder. Deposition zones are configured for substrate rotation or displacement during upward deposition.
Tool multifunctionality and flexibility is founded on the following key features: